Ion-slicing
Web11 mei 2007 · Abstract: We present the first demonstration of electro-optically tunable microring wavelength filters in submicrometer-thick LiNbO 3 films fabricated by crystal ion slicing and wafer bonding techniques. A tunability of the transmission spectrum of 0.14 GHz/V has been measured in a wavelength region around 1550 nm. Web16 aug. 2024 · In this paper, a method to fabricate large-scale flexible monocrystalline silicon membrane by crystal-ion-slicing (CIS) technique using benzocyclobutene (BCB) …
Ion-slicing
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WebThe process uses ion implantation to weaken the crystal bondage in a lithium niobate wafer. The implanted crystal is then bonded to a handle substrate and a thin layer of lithium … Web10 okt. 2024 · In the exploration of ion-slicing technology, the priority is to realize surface blistering or exfoliation on the target crystal wafers by light elemental (e.g. H, He) ion …
Web10 okt. 2024 · In the exploration of ion-slicing technology, the priority is to realize surface blistering or exfoliation on the target crystal wafers by light elemental (e.g. H, He) ion implantation, combined with a post-annealing process. WebThe blistering efficiency in He-H-ions co-implanted and annealed InP has been found to peak and vanish in a narrow range of ion fluence ratio (ΦH/ΦHe=1.5–3.5) with a fixed He fluence of 2x10¹⁶...
Web16 jan. 2024 · Focused ion beam milling (FIB, Helios 5 UX, ThermoFisher Scientific) is used to investigate the cross-section of the devices. We measure sidewall angle, etch depth and trench depth as well as the redeposition on both the +Z and −Z side of the structure. Web1 jul. 2024 · According to the thickness design, the LN-SMR is fabricated by means of the CIS technique. First, He ions are implanted into a 4-in. 43°Y-cut LN wafer at an energy …
Web2 mrt. 2024 · Electro-optic modulators (EOMs), used to convert electrical data into optical data, serve as a technological pillar of the modern telecommunication industry. Without these devices, telecommunication channels would be severely bandwidth-limited, particularly in data centers.
Web23 sep. 2024 · It is based on the traditional smart-cut or crystal ion-slicing method, which consists of two steps: crystal ion slicing based on He + implantation and subsequent wafer bonding. The smart-cut process was performed with the services of NANOLN (Jinan Jingzheng Electronics Co., Ltd.). nothinz.comWeb5 nov. 2024 · An experimental configuration for velocity map ion imaging experiments is presented, in which a pulsed voltage defocusses the ion Newton sphere along the time-of-flight axis. This significantly spreads the times-of-flight for ions with the same mass-to-charge ratio, allowing for either sliced or three-dimensional velocity imaging with high … nothinz shoes for womenWebThe process uses ion implantation to weaken the crystal bondage in a lithium niobate wafer. The implanted crystal is then bonded to a handle substrate and a thin layer of lithium niobate is transferred to the handle substrates using crystal ion slicing technique. how to set up wireless wifi repeaterWeb15 dec. 2024 · Ion-implantation at liquid nitrogen conditions can ensure that the implanted He + ions were trapped in the vacancies of the damage layer to realize layer-splitting, … nothin什么意思WebThis technology includes ion implantation, direct wafer bonding, and thermal splitting. It is widely used for the fabrication of SOI wafersand can also be used for the fabrication of … nothird.co.ukWeb3 jan. 2024 · In the present work, sub-micron thick YXl-36 LN thin films are transferred by ion slicing technique, and a fluidic benzocyclobutene (BCB) layer is adopted as the bonding medium. The replacement of SiO 2 by BCB significantly increase the tolerance of wafer bonding for the surface flatness, thus a patterned bottom electrode is easily buried … how to set up withings blood pressureWebDurch die breitflächige CSP (Cross Section Polishing)-Ionenstrahlpräparation wird dies möglich. Anhand ausgewählter Beispiele werden die Vor- und Nachteile der mittlerweile … nothinz slip resistant shoes